Daahan Magnetron sputtering waa hab cusub oo daahan uumiga jirka, marka la barbar dhigo habka daahan uumi hore, faa'iidooyinka ay dhinacyo badan oo aad u cajiib ah.Sida tignoolajiyada qaan-gaadhka ah, sputtering magnetron ayaa lagu dabaqay meelo badan.
Mabda'a sputtering Magnetron:
Goob magnetic orthogonal ah iyo goob koronto ayaa lagu daraa inta u dhaxaysa tiirka bartilmaameedka ah ee la firdhiyey (cathode) iyo anode, gaaska loo baahan yahay (sida caadiga ah gaaska Ar) ayaa lagu buuxiyaa qolka faakuumka sare.Magnet-ka joogtada ahi waxa uu samaysaa dhul magnetic 250-350 gaus ah oo ku yaala dusha sare ee walaxda la beegsanayo, iyo goobta korantada ee orthogonal waxa ay ka kooban tahay koronto sare.Under saamaynta beerka korontada, Ar gaaska ionization galay ion togan iyo electrons, bartilmaameed oo uu leeyahay cadaadis taban gaar ah, ka bartilmaameed ka cirka by saamaynta field magnetic iyo korodhka itimaalka ionization gaaska shaqada, sameeyaan Plasma cufnaanta sare u dhow cathode, Ar ion oo hoos timaada ficilka xoogga lorentz, xawaaraha u duulista dusha sare ee bartilmaameedka, duqaynta dusha sare ee bartilmaameedka xawaaraha sare, Atomyada sputtered ee bartilmaameedka waxay raacaan mabda'a isbeddelka xawaaraha waxayna ka duulaan dusha bartilmaameedka oo leh kinetic sare tamarta filimka dhigaalka substrate.
Tuuritaanka Magnetron guud ahaan waxa loo qaybiyaa laba nooc: sputtering DC iyo RF sputtering.Mabda'a qalabka wax lagu dhufto ee DC waa mid fudud, heerkuna waa dhakhso marka birta la daadiyo.Isticmaalka sputtering RF waa mid aad u ballaaran, marka lagu daro ku shubidda qalabka korantada, laakiin sidoo kale ku shubaya walxaha aan waxtarka lahayn, laakiin sidoo kale diyaargarowga firfircoonida ee oxides, nitrides iyo karbides iyo walxaha kale ee isku dhafan.Haddii inta jeer ee RF uu kordho, waxay noqotaa mikrowave plasma sputtering.Waqtigan xaadirka ah, resonance electron cyclotron (ECR) nooca microwave sputtering balasmaha ayaa caadi ahaan loo isticmaalaa.
Daahan daahan Magnetron sputtering walxaha bartilmaameedka:
Walxaha la beegsanayo biraha dahaadhida, daahan daahan daahan daahan daahan, dhoobada dhoobada ah, Biride dhoobada, karboide dhoobada, fluoride dhoobada, nitride dhoobada, nitride dhoobada, selenide, selenide, selenide, Silicide ceramic sputtering maaddooyinka bartilmaameedka ah, sulfide dhoobada bartilmaameedka ah, Telluride bartilmaameedka dhoobada dhoobada, bartilmaameedka kale ee dhoobada, bartilmaameedka dhoobada chromium-doped silicon oxide (CR-SiO), bartilmaameedka fosfide indium (InP), bartilmaameedka arsenide (PbAs), indium arsenide bartilmaameedka (InAs).
Waqtiga boostada: Agoosto-03-2022