Isticmaalayaal badan ayaa laga yaabaa inay maqleen wax ku saabsan wax soo saarka bartilmaameedka sputtering, laakiin mabda'a bartilmaameedka sputtering waa inuu ahaadaa mid aan la aqoon.Hadda, tifaftirahaAlaabta Gaarka ah ee Qani (RSM) waxay wadaagaan mabaadi'da sputtering magnetron ee bartilmaameedka sputtering.
Beerta magnetic orthogonal iyo beer koronto ayaa lagu daraa inta u dhaxaysa korantada bartilmaameedka ah (cathode) iyo anode, gaaska loo baahan yahay (guud ahaan gaaska Ar) ayaa lagu buuxiyaa qolka faaruqinta sare, magnet joogto ah wuxuu sameeyaa 250 ~ 350 Gauss magnetic field on dusha sare ee xogta la beegsanayo, iyo goobta korantada ee orthogonal electromagnetic waxaa la sameeyay koronto-sare oo koronto ah.
Marka la eego saamaynta beerta korantada, gaaska Ar waxa loo ionized ion togan iyo electrons.Xoogaa sare oo taban oo gaar ah ayaa lagu daraa bartilmaameedka.Saamaynta magnetic field on electrons ka soo baxaya cirifka bartilmaameedka iyo ixtimaalka ionization ee korodhka gaasta shaqada, samaynta balasmaha cufnaanta sare ee u dhow cathode ah.Marka la eego saameynta xoogga Lorentz, Ar ions waxay ku dadajiyaan dusha bartilmaameedka waxayna duqeeyaan dusha bartilmaameedka xawaare aad u sarreeya. in lagu shubo filimada.
Tuuritaanka Magnetron guud ahaan waxa loo qaybiyaa laba nooc: sputtering Tributary iyo RF sputtering.Mabda'a qalabka sputtering tributary waa mid fudud, iyo heerkeedu sidoo kale waa dhakhso marka biraha la tufayo.RF sputtering si weyn ayaa loo isticmaalaa.Marka laga soo tago in ay ku tufi karto alaabada korantada, waxa ay sidoo kale daadin kartaa alaabta aan shaqaynayn.Isla mar ahaantaana, waxay sidoo kale qabataa sputtering falcelin si ay u diyaariyaan qalabka oksaydhyada, nitrides, karbides iyo xeryahooda kale.Haddii inta jeer ee RF la kordhiyo, waxay noqon doontaa mikrowave plasma sputtering.Hadda, resonance electron cyclotron (ECR) mikrowave balasmaha sputtering ayaa caadi ahaan loo isticmaalaa.
Waqtiga boostada: Meey-31-2022