Mabda'a dahaarka faakuumka

Dahaarka faakuumka waxa loola jeedaa kulaylinta iyo uumi-baxa isha uumiga ee faakuumka ama ku tufida bamamka ion la dedejiyey, iyo dhigista dusha sare ee substrate si ay u sameeyaan filim hal lakab ah ama lakab badan.Waa maxay mabda'a daahan vacuum?Marka xigta, tafatiraha RSM ayaa noo soo bandhigi doona.

　　1. Dahaarka uumi-baxa ee faakuumka

Daahan uumi wuxuu u baahan yahay in masaafada u dhaxaysa molecules uumiga ama atamka ka isha uumiga iyo substrate in la dahaarka waa in ay ahaataa mid ka yar celceliska wadada lacag la'aan ah ee molecules gaaska haraaga qolka daahan, si loo hubiyo in molecules uumiga ee uumi-baxa wuxuu gaari karaa dusha sare ee substrate-ka iyada oo aan isku dhicin.Hubi in filimku uu saafi yahay oo adag yahay, oo uumi-baxu aanu oksaydhnayn.

　　2. dahaarka vacuum sputtering

Markay vacuum-ka jirto, marka ay ions-ada degdega ahi ay ku dhacaan kuwa adag, dhinaca kalena, crystals waa dhaawac gaadhay, dhinaca kale, waxay isku dhacaan atamka ka kooban crystal, iyo ugu dambeyntii atamka ama molecules ee dusha sare ee adag. dibadda u tufo.Walaxda la shubay ayaa lagu dahaadhay substrate si ay u sameeyaan filim khafiif ah, kaas oo loo yaqaan vacuum sputter plating.Waxaa jira habab badan oo xafid, kuwaas oo ay ka mid yihiin sputtering diode waa kan ugu horreeya.Marka loo eego bartilmaameedyada cathode ee kala duwan, waxaa loo qaybin karaa hadda tooska ah (DC) iyo soo noqnoqoshada sare (RF).Tirada atamka ee lagu miiray iyadoo saameyn ku yeelanaysa meesha la beegsanayo ee ion waxaa loo yaqaannaa heerka sputtering.Iyada oo heerka xajmigu sarreeyo, xawaaraha samaynta filimku waa dhakhso.Heerka xawaashku wuxuu la xiriiraa tamarta iyo nooca ions iyo nooca walxaha bartilmaameedka ah.Guud ahaan marka la hadlo, xadiga xashiishka wuxuu kordhiyaa kororka tamarta ion bini'aadamka, iyo heerka qulqulka biraha qaaliga ah ayaa sarreeya.