Lataliyaha farsamada ee RSM ayaa kula wadaagi doona faa'iidooyinka cylindrical iyo planar magnetron sputtering targets?Marka la barbar dhigo bartilmaameedyada kale ee magnetron-ka, bartilmaameedyada cylindrical iyo planar magnetron sputtering waxay heystaan faa'iidooyinka isku mid ahaanshaha daahan wanaagsan ee bartilmaameedyada leydiga ah, waxayna sare u qaadi karaan isticmaalka bartilmaameedyada iyada oo loo marayo labada siyaabood ee soo socda:
(1) Marka labada kooxood (afar) ee godad annular ah oogada sare ee bartilmaameedku ay gaadhaan qoto dheer, udub dhexaadka bartilmaameedka (qaybta magnet) waxaa loo rogi karaa 45 ° marka loo eego tuubada bartilmaameedka, si meelaha kale ee tuubada bartilmaameedka kuwa aan daxalka ahayn waa la isticmaali karaa;
(2) Marka xudunta bartilmaameedka ah ee bartilmaameedka cylindrical iyo planar magnetron sputtering bartilmaameedka loo qaabeeyey sida xudunta wareega wareega ah (xudunta bartilmaameedku waa wareegeysa inta lagu jiro sputtering), dusha bartilmaameedka si siman ayaa loo kala firdhi karaa lakabka iyada oo aan godad lahayn.Waqtigan xaadirka ah, bartilmaameedka ayaa loo isticmaali doonaa sida ugu waxtarka badan, iyo heerka ka faa'iidaysiga bartilmaameedku wuxuu gaari karaa 50% ~ 60% Marka maadada la beegsanayo ay tahay birta qaaliga ah, tani waxay si cad u leedahay muhiimad weyn.
Iyadoo la adeegsanayo mabda'a magnetka leh kabaha cirifka ee coaxial cylindrical magnetron sputtering target si loo xalliyo dhibaatada dhamaadka magnetic field, bartilmaameedka diyaarada leydi ah waxaa loo rogi karaa bartilmaameed cylindrical iyo planar magnetron sputtering, bartilmaameedku wuxuu kordhin karaa heerka isticmaalka ee bartilmaameedka. iyadoo la ilaalinayo lebbiska dahaarka wanaagsan ee bartilmaameedka diyaaradda leydi-geeska ah Si loo hagaajiyo faa'iidooyinka dhaqaale.
Waqtiga boostada: Jul-04-2022