Faa'iidooyinka iyo faa'iido darrada tignoolajiyada dahaarka sputtering

Dhawaan, isticmaaleyaal badan ayaa wax ka waydiiyay faa'iidooyinka iyo faa'iido darrada tignoolajiyada dahaadhka sputtering, Sida laga soo xigtay shuruudaha macaamiisheena, hadda khabiiro ka socda Waaxda Tiknoolajiyada RSM ayaa nala wadaagi doona, iyagoo rajeynaya inay xalliyaan dhibaatooyinka.Waxaa laga yaabaa inay jiraan qodobbada soo socda:

　　1. Magnetron oo aan dheeli tirnayn

Iyadoo loo maleynayo in qulqulka birlabeedka ee dhex mara cidhifyada birlabeedka gudaha iyo dibadda ee magnetron sputtering cathode uusan sinnayn, waa kathode-ka dareeraha ee magnetron-ka oo aan dheellitirneyn.Meesha birlabeedka ee cathode-ka caadiga ah ee magnetron sputtering cathode waxa ay ku urursan tahay meel u dhow meesha la beegsanayo, halka magnetic field of magnetron sputtering cathode oo aan dheeli tirnayn uu ka soo baxo bartilmaameedka.Goobta magnetic ee cathode magnetron ee caadiga ah waxay si adag u xaddidaysaa balasmaha u dhow dusha bartilmaameedka, halka balasmaha u dhow substrate-ka uu yahay mid aad u daciif ah, substrate-kana aan lagu qarxin doonin ions iyo electrons xooggan.Goobta magnetron cathode magnetic-ka ee aan dheeli tirnayn waxay balaasmaha ka dheerayn kartaa meel ka durugsan oogada la beegsanayo oo quusin karta substrate-ka.

　　2. Xafida inta jeer ee raadiyaha (RF).

Mabda'a dhigaalka dahaadhka filimka: awood taban ayaa lagu dabaqaa kaarida lagu dhejiyay dhabarka bartilmaameedka.Balaasmaha dheecaanka dhalaalka ah, marka saxanka hagaha ion togan uu deddejiyo, waxay duqaysaa bartilmaameedka dahaarka ee hortiisa si uu u tufo.Tuugtu waxay socon kartaa kaliya 10-7 ilbiriqsi.Taas ka dib, awoodda togan ee lagu sameeyay kharashka togan ee lagu ururiyay bartilmaameedka dahaarka ayaa ka dhigaya awoodda taban ee saxanka kirishbooyada, sidaas darteed duqeymaha tamarta sare ee tamarta sare ee bartilmaameedka waa la joojiyaa.Waqtigan xaadirka ah, haddii polarity ee sahayda korantada dib loo rogo, elektaroonadu waxay garaaci doonaan saxanka dahaadhka waxayna ka takhalusi doonaan kharashka togan ee saxanka dahaadhka 10-9 ilbiriqsi gudahood, taasoo ka dhigaysa eber.Waqtigaan, dib u noqoshada polarity ee sahayda korantadu waxay soo saari kartaa sputtering 10-7 ilbiriqsi.

Faa'iidooyinka RF sputtering: bartilmaameedyada birta ah iyo bartilmaameedyada dielectric labadaba waa la tuman karaa.

　　3. DC magnetron sputtering

Qalabka dahaarka ee magnetron wuxuu kordhiyaa goobta magnetic ee bartilmaameedka cathode ee DC, wuxuu isticmaalaa xoogga Lorentz ee goobta magnetic si uu u xidho oo uu u kordhiyo jihada elektaroonigga ah ee beerta korantada, waxay kordhisaa fursada isku dhaca u dhexeeya electrons iyo atomiyada gaaska, waxay kordhisaa Qiyaasta ionization ee atamka gaaska, waxay kordhisaa tirada ions tamar sare leh ee duqaysa bartilmaameedka waxayna hoos u dhigtaa tirada tamarta sare ee elektarooniga ah ee duqeeya substrate-ka dahaadhsan.

Faa'iidooyinka sputtering magnetron planar:

1. Cufnaanta awoodda bartilmaameedku waxay gaari kartaa 12w/cm2;

2. Danabka bartilmaameedku wuxuu gaari karaa 600V;

3. Cadaadiska gaaska wuxuu gaari karaa 0.5pa.

Khasaaraha ka soo baxa magnetron-ka planar: bartilmaameedku wuxuu sameeyaa kanaalka xajinta ee aagga runway-ga, xoqidda dhammaan dusha sare ee bartilmaameedku waa mid aan sinnayn, iyo heerka isticmaalka bartilmaameedku waa 20% - 30% kaliya.

　　4. Dhexdhexaadiyaha inta jeer ee AC magnetron sputtering

Waxa loola jeedaa in inta jeer ee dhexdhexaadka ah ee AC magnetron qalabka sputtering, sida caadiga ah laba bartilmaameed oo leh cabbir iyo qaab isku mid ah ayaa loo habeeyey dhinac dhinac, inta badan loo tixraaco bartilmaameedyo mataano ah.Waa qalab la hakiyey.Caadiyan, laba bartilmaameed ayaa isku mar la xoojiyaa.Inta lagu jiro habka dhexdhexaadinta celceliska AC magnetron falcelinta falcelinta, labada bartilmaameed waxay u dhaqmaan sida anode iyo cathode, waxayna u dhaqmaan sida cathode anode midba midka kale ee wareegga nuska ah.Marka bartilmaameedku uu ku jiro awoodda wareegga nuska taban, dusha bartilmaameedka ayaa la duqeeyaa oo ay daadiyaan ions togan;Wareegga badhkii togan, electrons ee balaasmaha ayaa lagu dedejiyaa dusha bartilmaameedka si loo baabi'iyo kharashka togan ee ku ururay dusha sare ee dusha sare ee bartilmaameedka, taas oo aan kaliya xakamaynaynin dabka dusha sare ee bartilmaameedka, laakiin sidoo kale waxay tirtirtaa ifafaale " anode la waayo”.

Faa'iidooyinka soo noqnoqda dhexdhexaadka ah ee labajibbaaran ee falcelinta falcelinta waa:

(1) Heerka dhigaalka sare.Bartilmaameedyada silikon, heerka meel dhigista ee soo noqnoqoshada falcelinta falcelinta falcelinta ee soo noqnoqda dhexdhexaadka ah waa 10 jeer marka la barbardhigo falcelinta falcelinta DC;

(2) Habka tufaaxa waxa lagu dejin karaa goobta shaqada ee loo dejiyay;

(3) Ifafaalaha "shiddada" waa la tirtiray.Cufnaanta cilladda filimka dahaadhka ah ee la diyaariyey waa dhawr amar oo ka hooseeya kan habka wax-soo-saarka falcelinta DC;

(4) Heerkulka substrate-ka sare wuxuu faa'iido u leeyahay inuu hagaajiyo tayada iyo dhejinta filimka;

(5) Haddii korontadu ay ka fududahay in la waafajiyo bartilmaameedka marka loo eego korontada RF.

　　5. Wax-soo-saarka magnetron-ka firfircoon

Geedi-socodka xashiishada, gaaska falcelinta waxaa la quudiyaa si ay ula fal-gasho walxaha la tufay si loo soo saaro filimo isku dhafan.Waxay ku siin kartaa gaas fal-celin ah si ay uga falceliso bartilmaameedka isku dhafka ah ee isku mar, waxayna sidoo kale ku siin kartaa gaas fal-celin ah si ay uga fal-celiso birta sputtering ama bartilmaameedka daawaha isku mar si loogu diyaariyo aflaanta isku dhafka ah ee saamiga kiimikada la siiyay.

Faa'iidooyinka filimaanta isku-darka ah ee magnetron-ka falcelisa:

(1) Qalabka bartilmaameedka ah iyo gaasaska falcelinta ee loo isticmaalo waa ogsijiin, nitrogen, hydrocarbons, iwm, kuwaas oo inta badan si fudud loo heli karo alaab nadiif ah, taas oo ku habboon diyaarinta filimada isku dhafan ee nadiifka ah;

(2) Iyadoo la hagaajinayo cabbirrada habka, kiimikooyinka kiimikada ama filimada aan kiimikada ahayn ayaa la diyaarin karaa, si sifooyinka filimada loo hagaajin karo;

(3) Heerkulka substrate ma sarreeyaa, waxaana jira xaddidaadyo yar oo ku saabsan substrate-ka;

(4) Waxay ku habboon tahay daahan labbiska weyn ee aagga waxayna xaqiiqsato wax soo saarka warshadaha.

Inta lagu jiro geeddi-socodka fal-celinta magnetron-ka, xasillooni-darrada ka-soo-baxa isku-dhafka ah waa sahlan tahay in ay dhacdo, badiyaa ay ku jiraan:

(1) Way adag tahay in la diyaariyo bartilmaameedyada isku dhafan;

(2) ifafaale ka mid ah soo-baxa arc ee ay sababto sumowga bartilmaameedka ah iyo xasillooni-darrada geeddi-socodka candhuufta;

(3) Heerka meel dhigista xashiishka oo hooseeya;

(4) Cufnaanta cilladda filimku waa mid sarreeya.